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US 2006/0125032 A1Published application
Micro electro mechanical system apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsMitsuhiko Kitagawa, Yoshiaki Aizawa
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Abstract
A MEMS (micro electro mechanical system) apparatus is equipped with a light-emitting circuit, having a light-emitting device, to emit light; a light-receiving circuit having a series circuit of series-connected light-receiving devices that receive the emitted light to generate a voltage; and a MEMS assembly driven by the generated voltage.
Claims18
1-34. (canceled)
A MEMS (micro electro mechanical system) apparatus comprising:
- a light-emitting circuit, having a light-emitting device, to emit light;
- a light-receiving circuit having a series circuit of series-connected light-receiving devices that receive the emitted light to generate a voltage;
- a MEMS assembly driven by the generated voltage;
- and
- a discharging circuit to discharge a voltage generated across the series circuit when emission of light from the light-emitting circuit is brought to a halt,
- the light-receiving circuit and the discharging circuit being fabricated on a semiconductor chip.
3 more elements
Dependencies are inferred from the claim text.