Substrate detector and method for detecting a substrate
OwnerYasuhito Anzaiinventor
Life of this patent
Estimating the term…
Abstract
The invention relates to a substrate detectors ng a substrate presence/absence regardless of substrate material and also of reducing the size increase in the apparatus. There are included a light emitter for emitting light toward a transport path of the substrate such that the light is obliquely incident upon a surface of the substrate, and a light receiver arranged in a position to receive the light passed the transport path of the substrate. The light receiver includes at least a plurality of sensors arranged in series.
Claims17
A substrate detector for optically detecting a substrate, the detector comprising:
- a light emitter for emitting light toward a transport path of the substrate such that the light is obliquely incident on a surface of the substrate;
- and
- a light receiver arranged in a position to receive the light that has passed the transport path of the substrate;
- wherein the light receiver includes at least a plurality of sensors arranged in series.
A substrate detector for optically detecting a substrate, the detector comprising:
- a light emitter for emitting light toward a position of a peripheral edge of the substrate mounted on a stage, the light being obliquely incident on a surface of the substrate;
- and
- a light receiver arranged in a position to receive the light that has passed the position of the peripheral edge of the substrate;
- wherein the light receiver includes at least a plurality of sensors arranged in series.
A substrate detecting method for optically detecting a substrate, the method comprising:
- a step of emitting light toward a transport path of the substrate from the light emitter so that the light is obliquely incident on a surface of the substrate;
- a step of receiving light that has passed the transport path of the substrate by a light receiver includes at least a plurality of sensors arranged in series;
- and
- a step of converting light received at the light receiver into digital data on a sensor-by-sensor basis and detecting a substrate presence/absence depending upon a converted digital data string.
A substrate detecting method for optically detecting a substrate, the method comprising:
- a step of emitting light from a light emitter a position of a peripheral edge of the substrate mounted on a stage so that the light is obliquely incident on a surface of the substrate;
- a step of receiving light that has passed the position of a peripheral edge of the substrate by a light receiver including at least a plurality of sensors arranged in series;
- and
- a step of converting light received by the light receiver into digital data on a sensor-by-sensor basis and detecting a substrate presence/absence depending upon a converted digital data string.
Dependencies are inferred from the claim text.