Near-field light generating method, near-field exposure mask, and near-field exposure method and apparatus
AssigneeCanon Kabushiki Kaisha
InventorsNatsuhiko Mizutani, Tomohiro Yamada
Life of this patent
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Abstract
A near-field light generating method for forming a fine light spot at a portion adjacent to a fine opening having a size of not more than a wavelength of light on a light outgoing side of the fine opening by irradiating the fine opening with the light includes a step of forming a light spot having a length and a width which are substantially equal to each other by the fine opening. The fine opening has a rectangular shape having a length and a width which are different from each other.
Claims13
A near-field light generating method for forming a fine light spot at a portion adjacent to a fine opening having a size of not more than a wavelength of light on a light outgoing side of the fine opening by irradiating the fine opening with the light, said method comprising:
- forming a light spot having a length and a width which are substantially equal to each other by the fine opening, the fine opening having a rectangular shape having a length and a width which are different from each other.
A near-field exposure mask, comprising:
- a mask base material,
- a light blocking layer disposed on the mask base material, and
- a fine opening having a size of not more than a wavelength of light used for exposure,
- wherein the fine opening comprises a rectangular opening having a length and a width which are different from each other, the rectangular opening having a length/width ratio which permits transfer of a pattern having a length and a width which are substantially equal to each other.
A near-field optical head, comprising:
- means for generating near-field light, provided with a rectangular fine opening having a size of not more than a wavelength of light or a combination of the rectangular fine opening and a slit-like opening,
- wherein a light spot having a length and a width which are substantially equal to each other by the rectangular fine opening, is formed at a portion adjacent to an opening portion on a light outgoing side of the rectangular fine opening.
Dependencies are inferred from the claim text.