Optically blocked reference pixels for focal plane arrays
AssigneeL-3 Communications Corporation
InventorsThomas Schimert, Athanasios Syllaios, Roland Gooch, William McCardel
Life of this patent
Estimating the term…
Abstract
Methods for making optically blind reference pixels and systems employing the same. The reference pixels may be configured to be identical to, or substantially identical to, the active detector elements of a focal plane array assembly. The reference pixels may be configured to use the same relatively longer thermal isolation legs as the active detector pixels of the focal plane, thus eliminating joule heating differences. An optically blocking structure may be placed in close proximity directly over the reference pixels.
Claims28
A focal plane array package assembly, comprising:
- at least one active detector pixel element;
- at least one reference pixel element;
- an optically blocking structure disposed in spaced relationship with said at least one reference pixel element to at least partially optically block said reference pixel;
- and
- a package assembly lid overlying said at least one active detector pixel element and said at least one reference pixel element;
- said package assembly lid comprising said optically blocking structure.
A focal plane array assembly, comprising:
- a device wafer die element, said device wafer die element comprising at least one active detector pixel element array and at least one reference pixel array disposed on a first surface thereof;
- and
- a lid wafer element, said lid wafer element having a first surface disposed in relationship to said first surface of said device wafer die element so that said first surface of said lid wafer element overlies said at least one active detector pixel element array and said at least one reference pixel element array;
- wherein said lid wafer element is configured to optically block said at least one reference pixel element.
A method of making a focal plane array assembly, comprising:
- providing at least one active detector pixel and at least one reference pixel on a first surface of a device wafer;
- and
- disposing a lid wafer in relationship to said device wafer, said lid wafer comprising an optically blocking structure disposed in a spaced relationship to said at least one reference pixel of said device wafer.
Dependencies are inferred from the claim text.