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US 2006/0124666 A1Published application
Vacuum device
OwnerNobuyuki Takahashiinventor
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Abstract
The present invention is, in a vacuum device which comprises at least a plurality of vacuum containers which are located in series via gate valves, at least one carrier located in the vacuum containers and movable between the vacuum containers, a first exhaust mechanism connected to the vacuum containers, a vacuum forming mechanism connected to the vacuum containers and a gas supplying mechanism for supplying gas to the vacuum containers, the invention is that the vacuum forming mechanism comprises a vacuum pump and an intermediate container between the vacuum pump and the vacuum containers.
Claims8
A vacuum device comprising:
- a plurality of vacuum containers arranged in series via gate valves;
- a first exhausting mechanism connected to said vacuum containers respectively;
- a vacuum forming mechanism connected to said vacuum containers respectively;
- and
- a gas supplying mechanism for supplying gas to said vacuum containers respectively;
- wherein said vacuum forming mechanism is provided with a vacuum pump and an intermediate container between said vacuum pump and said vacuum containers respectively.
3 more elements
Dependencies are inferred from the claim text.