Method and device for processing inside of transparent material
AssigneeRiken
InventorsKoji Sugioka, Ya Cheng, Katsumi Midorikawa
Life of this patent
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Abstract
A shape with a substantially perfect circle is obtained as a processed shape such as a modified shape or a worked shape at a light focus point in a cross-section in a direction parallel to an advance direction of a femtosecond laser light beam. A section in a direction perpendicular to an advance direction of a laser light beam emitted from a femtosecond laser (10) is formed in a predetermined shaped. The laser light of which sectional shape in the direction perpendicular to the advance direction is formed in the predetermined shape is entered into a lens (14). The light is focused by the lens inside a transparent material (100) and processes the inside of the transparent material.
Claims8
A method of processing the inside of a transparent material, comprising the steps of:
- shaping a beam shape of a cross-section in a direction perpendicular to the advance direction of laser light beam, which has been emitted from a femtosecond laser, in a predetermined shape;
- allowing the laser light, whose beam shape of the cross-section in the direction perpendicular to said advance direction is shaped in said predetermined shape, to enter a lens and focusing the light on the inside of a transparent material by the lens;
- and
- processing the inside of said transparent material by the operation of the laser light that has been focused on the inside of said transparent material.
A device of processing the inside of a transparent material, comprising:
- a femtosecond laser that emits laser light;
- beam shape shaping means that shapes the beam shape of a cross-section in a direction perpendicular to the advance direction of laser light beam, which has been emitted from said femtosecond laser, in a predetermined shape;
- and
- a lens into which the laser light, whose beam shape of the cross-section in the direction perpendicular to said advance direction has been shaped in the predetermined shape by said beam shape shaping means, is allowed to enter and which focuses the laser light on the inside of a transparent material, wherein
- the inside of said transparent material is processed by the operation of the laser light that has been focused on the inside of said transparent material by said lens.
Dependencies are inferred from the claim text.