Thinner composition, method of preparing the same and method of recovering the same
AssigneeSamsung Electronics Co., Ltd.
InventorsDong-Ki Lee, Jin-Ho Ju, Hi-Kuk Lee, Seon-Su Sin, Kwang-Soo Lee, Jae-Woong Mun
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Abstract
A thinner composition is provided which includes about 60-80% by weight of propylene glycol mono-alkyl ether having a boiling point of T1° C., about 10-30% by weight of alkyl acetate having a boiling point of T2° C., and about 1-10% by weight of a solvent. The solvent has a boiling point of T3° C. and satisifes the equation (1). T2<T3<T2+30 (1)
Claims20
A thinner composition, comprising:
- about 60-80% by weight of propylene glycol mono-alkyl ether having a boiling point of T1° C.;
- about 10-30% by weight of alkyl acetate having a boiling point of T2° C.;
- and
- about 1-10% by weight of a solvent, the solvent having a boiling point of T3° C. and satisfying the equation (1).
- T2<T3<T2+30 (1)
A thinner composition, comprising;
- about 60-80% by weight of propylene glycol mono-methyl ether (PGME);
- about 10-30% by weight of n-butyl acetate (NBA);
- and
- about 1-10% by weight of propylene glycol mono-methyl ether acetate (PGMEA).
A thinner composition comprising a first component having a boiling point of Th° C. which is the highest boiling point among a plurality of effective components in the composition;
- and a second component comprising a solvent, the solvent having a boiling point of T1° C. and satisfying the equation (2).
- Th<T1<Th+30 (2)
A method of preparing a thinner composition comprising:
- providing a plurality of effective components in forming the thinner composition;
- adding a second component comprising a solvent to the plurality of effective components, the solvent having a boiling point of T1° C. and satisfying the equation (3), wherein one of the effective components is a first component having a boiling point of Th° C. which is the highest boiling point among the plurality effective components in the composition.
- Th<T1<Th+30 (3)
A method of recovering a thinner composition from a waste thinner composition comprising:
- heating the waste thinner composition at a temperature from about T1-5° C. to about T1° C., the waste thinner composition comprising a photoresist comprising a second component having a boiling point of T1° C. and satisfying the equation (4), and a thinner composition comprising a first component having a boiling point of Th° C. which is the highest boiling point among a plurality of effective components and the second component;
- and
- fractionally distilling the thinner composition from the waste thinner composition.
- Th<T1<Th+30 (4)
A method of recovering the thinner composition comprising fractionally distilling a waste thinner composition comprising a thinner composition, comprising propylene glycol mono-methyl ether (PGME), n-butyl acetate (NBA) and propylene glycol mono-methyl ether acetate (PGMEA), and a photoresist comprising propylene glycol mono-methyl ether (PGME), diethylene glycol dimethyl ether (DMC) and ethyl ethoxy propionate (EEP), at a temperature range of from about 141° C. to about 146° C.
A method for using a thinner composition to clean an object having a photoresist diposed therewith, comprising
- forming a thinner composition comprising about 60-80% by weight of propylene glycol mono-alkyl ether having a boiling point of T1° C.;
- about 10-30% by weight of alkyl acetate having a boiling point of T2° C.;
- and
- about 1-10% by weight of a solvent, the solvent having a boiling point of T3° C. and satisfying the equation (1).
- T2<T3<T2+30 (1);
- and
- washing said object having a photoresist thereon with said thinner composition.
Dependencies are inferred from the claim text.