Component separation device, method of producing the device, and method of separating component by using the device
AssigneePanasonic Corporation
InventorMasaya Nakatani
Life of this patent
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Abstract
A component separation device includes a substrate having a flow path formed therein and arranged to store a fluid containing a liquid component and a solid component, and an actuator causing the fluid stored in the flow path to vibrate. The actuator includes a first electrode provided on the substrate apart from the flow path, and a first piezoelectric member provided on the first electrode, and a second electrode provided on the first piezoelectric member. This separation device prevents the actuator from being contaminated by the fluid, and separates the components efficiently.
Claims20
A component separation device comprising:
- a substrate having a first surface and a second surface opposite to the first surface, the substrate having a flow path formed in the first surface, the flow path being arranged to store a fluid containing a liquid component and a solid component;
- an actuator causing the fluid stored in the flow path to vibrate, the actuator including
- a first electrode provided on the substrate apart from the flow path, and
- a first piezoelectric member provided on the first electrode, and a second electrode provided on the first piezoelectric member;
- and
- an outlet for taking out one of the liquid component and the solid component in the fluid therefrom.
A method of manufacturing a component separation device, comprising:
- forming a first electrode layer on a substrate;
- forming a piezoelectric layer on the first electrode;
- forming a second electrode layer on the piezoelectric member;
- processing the first electrode layer, the piezoelectric layer, and the second electrode layer to have predetermined patterns as to provide an actuator;
- and
- forming a flow path in the substrate by etching.
A method of separating components, comprising:
- providing a component separation device which includes
- a substrate having a first surface and a second surface opposite to the first surface, the substrate having a flow path formed in the first surface, and
- an actuator including a first electrode provided on the substrate apart from the flow path, first and second piezoelectric members provided on the first electrode, and second and third electrodes provided on the first and second piezoelectric members, respectively;
- storing a fluid containing a liquid component and a solid component in the flow path;
- causing the actuator to vibrate by applying a first voltage between the first electrode and the second electrode, the first voltage oscillating and having a DC bias, and by applying a second voltage between the first electrode and the third electrode, the second voltage oscillating and having a DC bias, the second voltage shifting in phase by 180 degrees from the first voltage;
- generating a standing wave in fluid stored in the flow path with a vibration of the actuator;
- and
- separating one of the solid component and the liquid component from the fluid having the standing wave generated therein.
Dependencies are inferred from the claim text.