Metal nanodot arrays and fabrication methods thereof
AssigneeIndustrial Technology Research Institute
InventorsRong-Ming Ho, In-Mau Chen, Yu-Tsan Tseng, Bao-Tsan Ko, Wen-Hsien Tseng
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Abstract
Metal nanodot arrays and fabrication methods thereof. A film of a block copolymer is deposited on a conductive substrate. The block copolymer comprises first polymer and second polymer blocks, wherein the first polymer blocks have a periodically ordered morphology. The first polymer blocks are selectively degraded to form a nanopatterned template comprising periodically ordered nanochannels. By electroplating, metal is deposited into the nanochannels that expose the conductive substrate, thus forming a metal nanodot array.
Claims29
A method for fabricating a metal nanodot array, comprising:
- providing a conductive substrate;
- depositing a film of a block copolymer on the conductive substrate, wherein the block copolymer comprises first polymer and second polymer blocks, the first polymer blocks forming a periodically ordered morphology;
- selectively degrading the first polymer blocks to form a nanopatterned template comprising periodically ordered nanochannels exposing the conductive substrate;
- and
- depositing metal into the nanochannels by electroplating, thereby forming the metal nanodot array.
A metal nanodot array, comprising
- a conductive substrate with conductive areas and non-conductive areas;
- and
- a metal nanodot array selectively disposed in the conductive areas of conductive substrate.
Dependencies are inferred from the claim text.