Thin film coating having niobium-titanium layer
OwnerKlaus Hartig, Annette Kriskoinventors
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Abstract
The invention provides niobium-titanium films, coatings (e.g., low-emissivity coatings) comprising one or more niobium-titanium films, and substrates bearings such coatings. Methods of depositing niobium-titanium films are also provided.
Claims13
A method of depositing a niobium-titanium layer, the method comprising providing a niobium-containing sputtering target and a titanium-containing sputtering target, positioning both targets in a sputtering chamber having a sputtering cavity in which an inert atmosphere is established, and delivering electric charge to both targets to sputter niobium and titanium onto a substrate having a major surface oriented toward both targets, thereby depositing niobium-titanium film upon an exposed outermost infrared-reflective silver or silver-containing film that is carried directly over a transparent dielectric film previously deposited over said major surface of the substrate, wherein the niobium-titanium film is deposited to a thickness of between about 10 angstroms and about 30 angstroms.
A method of depositing a low-emissivity coating onto a substrate, the method comprising:
- a) depositing a transparent dielectric film over a major surface of the substrate;
- b) depositing an infrared-reflective silver film directly over the transparent dielectric film, and
- c) depositing a niobium-titanium protective film directly over the infrared reflective silver film, wherein the niobium-titanium protective film is deposited by providing a niobium-containing sputtering target and a titanium-containing sputtering target, positioning both targets in a sputtering chamber having a sputtering cavity in which an inert atmosphere consisting essentially of noble gas is established, and delivering electric charge to both targets to sputter niobium and titanium directly onto the infrared-reflective silver film to form the niobium-titanium protective film, wherein the niobium-titanium protective film is deposited at a thickness of between about 10 angstroms and about 30 angstroms.
Dependencies are inferred from the claim text.