Thin film semi-permeable membranes for gas sensor and catalytic applications

A hydrogen sensor comprising:

• a thin film comprising palladium, the film capable of altering at least one of its physical parameters when exposed to hydrogen;
• and
• a hydrogen permeable layer comprising an oxide of silicon deposited on the thin film, wherein the hydrogen permeable layer is deposited by a pulsed direct current magnetron sputtering deposition process.

A hydrogen sensor comprising:

• a metal film comprising palladium, the film capable of altering at least one of its physical parameters when exposed to hydrogen;
• and
• a hydrogen permeable inorganic layer comprising silicon dioxide deposited on the metal film, wherein the hydrogen permeable inorganic layer is deposited by a pulsed direct current magnetron sputtering deposition process and wherein the hydrogen permeable inorganic layer ranges between 10-1000 Angstroms in thickness.