Diamond-coated silicon and electrode
OwnerHiroyuki Fujimura, Roberto Serikawa +2inventors
InventorsHiroyuki Fujimura, Roberto Serikawa, Naoki Ishikawa, Takahiro Mishima
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Abstract
The present invention intends to provide an industrially applicable diamond electrode and a diamond-coated silicon used in the electrode. A silicon substrate having a thickness of 500 μm or less, at least partially coated with electrically conductive diamond is used as a diamond-coated silicon. In addition, an electrically conductive support substrate and the diamond-coated silicon is used as an electrode. The diamond-coated silicon is flexible and it can be adhered to the electrically conductive support substrate, and thereby a large area electrode and a three-dimensional electrode structure can be easily obtained.
Claims9
A diamond-coated silicon comprising a silicon substrate having a thickness of 500 μm or less coated at least partially with electrically conductive diamond.
Dependencies are inferred from the claim text.