Method and apparatus for refining boron-containing silicon using an electron beam
AssigneeIIS Materials Corporation, Ltd.
InventorsNorichika Yamauchi, Takehiko Shimada, Masafumi Maeda
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Abstract
In a refining method for boron-containing silicon, boron-containing silicon is irradiated with an electron beam in a vacuum vessel to melt the boron-containing silicon. A boron compound-forming substance is introduced into the vacuum vessel, and boron contained in the molten silicon is formed into a boron compound. After at least a portion of the boron compound has vaporized, irradiation with the electron beam is stopped. The high-purity molten silicon can then be solidified.
Claims9
A method of refining boron-containing silicon using an electron beam comprising:
- irradiating boron-containing silicon in a vacuum chamber with an electron beam and melting the boron-containing silicon to form molten silicon;
- introducing into the vacuum chamber a boron compound-forming substance which bonds with boron in the molten silicon and forms a boron compound;
- and
- stopping the irradiation with the electron beam after at least a portion of the boron compound has vaporized.
An apparatus for refining boron-containing silicon using an electron beam comprising:
- a vacuum chamber;
- a crucible which is disposed inside the vacuum chamber for melting boron-containing silicon;
- an electron gun which irradiates the boron-containing silicon in the crucible with an electron beam and melts the boron-containing silicon;
- and
- an introducing mechanism for introducing into the vacuum chamber a boron compound-forming substance which bonds with boron in the molten silicon and forms a boron compound.
Dependencies are inferred from the claim text.