Pressure sensor with single deposit adhesive
AssigneeHoneywell International Inc.
InventorsGregory Parker, Allen Clapper, Tuyen Pham, Gerald Stark, Michael Goodson
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AssigneeHoneywell International Inc.
InventorsGregory Parker, Allen Clapper, Tuyen Pham, Gerald Stark, Michael Goodson
Estimating the term…
Pressure sensor methods and systems are disclosed. In general, two micromachined die and a diaphragm for a pressure sensor can be provided. The two micromachined die can be embedded in a glass adhesive on a surface of the diaphragm, such that the glass adhesive possesses a large size relative to the two micromachined die. The large size of the glass adhesive creates a large planar target for placement of the two micromachined die upon the diaphragm, thereby providing a size difference between the glass adhesive and the two micromachined die thereby creates an optimum strain transfer, while maintaining stability for the pressure sensor.
A pressure sensor method, comprising the steps of;
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A pressure sensor method, comprising the steps of:
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A pressure sensor system, comprising:
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The system of 22 further comprising a glass property associated with said glass adhesive, wherein said glass property comprises a firing temperature thereof that is less than a degradation temperature of said piezoelectric die or said pressure port.
Dependencies are inferred from the claim text.