Method and system for operating an air gauge at programmable or constant standoff
AssigneeASML Holding N.V.
InventorsDaniel Galburt, Boguslaw Gajdeczko
Life of this patent
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Abstract
Provided are a method and system for measuring a distance to an object. The system includes an air gauge configured to sense a distance to a surface of the object and a sensor configured to measure at least one from the group including (i) a relative position of the air gauge and (ii) a relative position of the surface of the object. Outputs of the air gauge and the sensor are combined to produce a combined air gauge reading.
Claims26
A gauging apparatus for measuring a distance to an object, comprising:
- an air gauge configured to sense a distance to a surface of the object;
- and
- a sensor configured to measure at least one from the group including (i) a relative position of the air gauge and (ii) a relative position of the surface of the object;
- wherein outputs of the air gauge and the sensor are combined to produce a combined air gauge reading.
A gauging apparatus including a metrology frame and being configured for sensing a distance to an object, the gauging apparatus comprising:
- an air gauge configured to sense a distance to a surface of the object;
- a sensor to measure movement of the air gauge relative to the metrology frame;
- a first device to control the movement of the air gauge and produce an output representative of the air gauge movement;
- and
- a second device to receive an output from the first device to maintain the distance between the air gauge and the surface at a substantially constant value.
A gauging system including a metrology frame and being configured to sense a distance to an object, the gauging system comprising:
- an object mounted on a stage movable in a predetermined direction;
- an air gauge positioned within the metrology frame and configured to sense a distance to a surface of the object;
- a sensor configured to sense a distance to the stage in the predetermined direction;
- a controlling device configured to control movement of the stage;
- and
- a combining device to combine outputs from the air gauge and the controlling device to thereby maintain the distance to the surface to the object at a substantially constant value based upon the combined outputs.
A gauging apparatus including a metrology frame and being configured for sensing a distance to an object, the gauging apparatus comprising:
- an air gauge configured to (i) produce a pre-load force and (ii) sense a distance to a surface of the object;
- and
- a sensor to measure movement to the air gauge relative to the metrology frame;
- wherein the distance is maintained substantially constant by the interaction of the preload force and a liquid from the air gauge at the surface of the object;
- and
- wherein outputs from the air gauge and the sensor are combined to increase a topology measurement capability of the air gauge.
A method for measuring a distance to an object in a gauging apparatus including at least an air gauge, the method comprising:
- sensing a distance to a surface of the object with the air gauge;
- measuring at least one from the group including (i) a relative position of the air gauge and (ii) a relative position of the surface of the object;
- and
- combining the sensed distance and the measurement to produce a combined distance measurement.
Dependencies are inferred from the claim text.