Method for calibrating semiconductor test instruments
AssigneeAdvantest Corporation
InventorToru Ibane
Life of this patent
Estimating the term…
Abstract
A method for calibrating a semiconductor test instrument leading cost reduction, simplified work, and short working time. Drivers are related to comparators in one-to-one correspondence. A clock signal and a strobe signal have a one-to-one correspondence. The phase of either a clock signal or a strobe signal is adjusted with reference to the phase of the other signal. The relative phase difference between clock signals or between strobe signals are determined. The phases of the clock and strobe signals are adjusted with reference to the relative phase difference.
Claims15
1-15. (canceled)
A method for calibrating a semiconductor test instrument for performing timing calibration of a semiconductor test instrument having drivers for generating signals synchronizing with clock signals and comparators for performing comparisons synchronizing with strobe signals, comprising:
- a first step of adjusting phases of said clock signals and phases of said strobe signals by making timings at which signals output from said drivers and input to said comparators are changed coincide with timings for performing comparisons by said comparators every group while said drivers and said comparators are divided into m number of groups so that two or more of said drivers or said comparators are included;
- a second step of obtaining relative phase differences between said clock signals corresponding to said drivers or relative phase differences between said strobe signals corresponding to said comparators for said different groups;
- and
- a third step of adjusting phases of said clock signals corresponding to said drivers and phases of said strobe signals corresponding to said comparators included in each of said groups in accordance with said relative phase differences.
29-84. (canceled)
Dependencies are inferred from the claim text.