Method for calibrating semiconductor test instruments
AssigneeAdvantest Corporation
InventorToru Ibane
Life of this patent
Estimating the term…
Abstract
A method for calibrating a semiconductor test instrument leading cost reduction, simplified work, and short working time. Drivers are related to comparators in one-to-one correspondence. A clock signal and a strobe signal have a one-to-one correspondence. The phase of either a clock signal or a strobe signal is adjusted with reference to the phase of the other signal. The relative phase difference between clock signals or between strobe signals are determined. The phases of the clock and strobe signals are adjusted with reference to the relative phase difference.
Claims14
1-60. (canceled)
A method for calibrating a semiconductor test instrument for performing timing calibration of a semiconductor test instrument having drivers for generating signals synchronizing with clock signals and comparators for performing comparisons synchronizing with strobe signals, comprising:
- a first step of adjusting phases of said strobe signals corresponding to each of said comparators on the basis of said clock signals corresponding to one of said drivers;
- a second step of adjusting phases of said clock signals corresponding to each of said drivers corresponded to each of said comparators on the basis of each of said strobe signals whose phase adjustment is completed in said first step;
- and
- said second step is executed by using a first calibration board in which each of said drivers corresponds to each of said comparators and the output end of the corresponding driver and the input end of the corresponding comparator are connected to each other.
(canceled)
73-84. (canceled)
Dependencies are inferred from the claim text.