Method for calibrating semiconductor test instruments
AssigneeAdvantest Corporation
InventorToru Ibane
Life of this patent
Estimating the term…
Abstract
A method for calibrating a semiconductor test instrument leading cost reduction, simplified work, and short working time. Drivers are related to comparators in one-to-one correspondence. A clock signal and a strobe signal have a one-to-one correspondence. The phase of either a clock signal or a strobe signal is adjusted with reference to the phase of the other signal. The relative phase difference between clock signals or between strobe signals are determined. The phases of the clock and strobe signals are adjusted with reference to the relative phase difference.
Claims18
1-44. (canceled)
A method for calibrating a semiconductor test instrument for performing timing calibration of a semiconductor test instrument having drivers for generating signals synchronizing with clock signals and comparators for performing comparisons synchronizing with strobe signals, comprising:
- a first step of adjusting phases of said strobe signals corresponding to an in-group common comparator by using one of said comparators included in each group as the in-group common comparator on the basis of said clock signals corresponding to a common driver by using one of said drivers as the common driver while said drivers and said comparators are divided into m number of groups so that two or more of said drivers or said comparators are included;
- a second step of adjusting phases of said clock signals on the basis of said strobe signals corresponding to said in-group common comparator in each of said m number of groups;
- and
- a third step of adjusting phases of said strobe signals corresponding to said comparators included in the same group on the basis of said clock signals corresponding to any one of said drivers in each of said m number of groups.
61-84. (canceled)
Dependencies are inferred from the claim text.