Creating and applying variable bias rules in rule-based optical proximity correction for reduced complexity
AssigneeTakumi Technology Corporation
InventorYouping Zhang
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Abstract
An optical proximity correction (OPC) based integrated circuit design system and method introduce a variable rule in which rules are specified in terms of multiple correction actions that yield acceptable results. This category of rules provides more degrees of freedom in actual application so that the rule-based OPC tool can intelligently select the proper valid rule that minimizes the OPC complexity or meets other objectives.
Claims44
A correction rule specification method in which the correction rule is used for rule-based optical proximity correction (OPC), comprising:
- specifying correction rules in which each correction rule consists of a set of matching conditions and a set of corresponding correction actions, in which at least one correction rule has at least two corresponding correction actions.
A rule-based optical proximity correction (OPC) system, comprising:
- means for receiving a correction rule consisting of a set of matching conditions and at least two corresponding correction actions;
- and
- means for determining an actual correction action by selecting one correction action from the at least two correction actions.
Dependencies are inferred from the claim text.