R2R controller to automate the data collection during a DOE
AssigneeTokyo Electron Limited
InventorJames Willis
Life of this patent
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Abstract
A system and a computer-implemented method of operating a processing system in which a process model is selected from a menu of process models available from the processing system. In the module and method, an experiment is designed having a number of process runs for characterization of the selected process model. Process runs to collect data are executed on a processing tool coupled to the processing system. The actual process results from the process runs are measured. The process model is solved for coefficients of the process model.
Claims58
A computer-implemented method for operation of a processing system, comprising:
- receiving a selection of a process model from a menu of process models available for characterization of a processing tool of the processing system;
- designing a number of process runs to characterize the selected process model on the processing tool;
- directing the process runs on the processing tool to collect data for input to the selected process model;
- obtaining actual process results from the process runs;
- and
- solving for coefficients of the process model.
A processing system comprising:
- a processing module;
- and
- a controller coupled to the processing module, wherein the controller comprises means for performing a substantially automatic design of experiments (DOE) procedure,
- said means for performing a substantially automatic DOE procedure including,
- means for selecting a process model,
- means for designing an experiment to collect process data using the selected process model,
- means for collecting the data when the number of process runs are performed, and
- means for determining coefficients for the selected process model using the collected data.
A computer-directed system for performing design of experiments techniques on a processing tool, comprising:
- a selection device having a menu of process models available for selection;
- a process controller coupled to the processing tool for control of the processing tool, and configured to receive from the selection device a selected process model, said process controller including a memory storing a determination algorithm for determination of a number of process runs required for characterization of the selected process model on the processing tool;
- a receiver configured to receive process data from executed process runs;
- and
- a data processor configured to receive the process data and solve for coefficients of the process model.
Dependencies are inferred from the claim text.