Method of making prestructure for MEMS systems
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorJeffrey Sampsell
Life of this patent
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Abstract
A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator element have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.
Claims74
A method of forming an interferometric display element, comprising:
- providing a substrate;
- depositing a layer of support post material over the substrate;
- patterning the layer of support post material to form at least two support posts;
- forming an electrode layer over the substrate, wherein the forming of the electrode layer is done after the forming of the at least two support posts;
- forming at least a first sacrificial layer over the electrode layer;
- and
- forming a mechanical layer over the sacrificial layer, wherein the mechanical layer covers a portion of each of the at least two support posts.
An apparatus, said apparatus comprising a plurality of interferometric modulator elements, said interferometric modulator elements comprising:
- a substrate;
- an electrode layer located over the substrate;
- at least two support posts located on the substrate;
- and
- a mechanical layer located over the electrode layer, said mechanical layer being supported by the at least two support posts.
A method of forming an interferometric display element, comprising:
- providing a substrate;
- forming an electrode layer over the substrate;
- forming at least two support posts over the substrate, wherein the forming of the at least two support posts is done after the forming of the electrode layer;
- forming at least a first sacrificial layer over the electrode layer;
- and
- forming a mechanical layer over the sacrificial layer, wherein the mechanical layer covers a portion of each of the at least two support posts.
A display, said display comprising a plurality of interferometric display elements, said interferometric display elements comprising:
- a substrate;
- an electrode layer located over the substrate;
- at least two support posts located on the electrode layer, wherein said posts comprise planarization material;
- and
- a mechanical layer located over the electrode layer, said mechanical layer being supported by the at least two support posts.
A display containing a plurality of interferometric modulators, wherein said interferometric modulators are formed by a method comprising:
- providing a substrate;
- depositing a layer of support post material over the substrate;
- patterning the layer of support post material to form at least two support posts;
- forming an electrode layer over the substrate, wherein the forming of the electrode layer is done after the forming of the at least two support posts;
- forming at least a first sacrificial layer over the electrode layer;
- and
- forming a mechanical layer over the sacrificial layer, wherein the mechanical layer covers a portion of each of the at least two support posts.
A method of making an interferometric display element, comprising:
- providing a substrate;
- forming support posts over the substrate;
- forming an electrode layer over the substrate;
- depositing a sacrificial layer over the electrode layer;
- forming a substantially planar surface over the sacrificial layer;
- forming a mechanical layer over the substantially planar surface;
- forming an insulator layer over at least part of the mechanical layer;
- and
- forming a substantially rigid support layer over the insulation layer.
An apparatus, plurality of interferometric modulator elements, said interferometric modulator elements comprising:
- a substrate;
- an electrode layer located over the substrate;
- a plurality of support posts located over the substrate;
- a rigid cap member located over each of at least some of the plurality of support posts, said rigid cap member comprising an insulator layer;
- and
- a mechanical layer located over the partially reflective electrode layer, wherein said mechanical layer is attached to the insulator layers of at least two rigid cap members.
A method of making a display element, comprising:
- depositing an electrode layer on a substrate;
- patterning the electrode layer;
- depositing a layer of sacrificial material over the electrode layer;
- patterning the layer of sacrificial material to form apertures;
- forming support posts in the apertures;
- forming a flexible layer over the layer of sacrificial material;
- depositing an insulator layer over the flexible layer;
- depositing a rigid support layer over the insulator layer;
- and
- removing the sacrificial material;
- thereby permitting movement of the flexible layer relative to the substrate.
A method of making a display element, comprising:
- depositing an electrode layer on a substrate;
- patterning the electrode layer;
- depositing a layer of sacrificial material over the electrode layer;
- patterning the layer of sacrificial material to form apertures;
- depositing a layer of non-planarizing support post material on the sacrificial material;
- patterning the non-planarizing support post material so as to remove support post material located away from the apertures, thereby forming support posts;
- forming a flexible layer over the support posts;
- and
- removing the sacrificial material;
- thereby permitting movement of the flexible layer relative to the substrate.
A display containing a plurality of interferometric modulators, wherein said interferometric modulators are formed by a method comprising:
- providing a substrate;
- forming support posts over the substrate;
- forming an electrode layer over the substrate;
- depositing a sacrificial layer over the electrode layer;
- forming a substantially planar surface over the sacrificial layer;
- forming a mechanical layer over the substantially planar surface;
- forming an insulator layer over at least part of the mechanical layer;
- and
- forming a substantially rigid support layer over the insulation layer.
Dependencies are inferred from the claim text.