Laser processing unit, laser processing method, and method for manufacturing semiconductor device

A laser processing method, in a laser processing unit including a laser oscillator, a lens, and a heater, comprising the steps of:

• radiating laser light from the laser oscillator;
• processing the radiated laser light into linear laser light by the lens;
• heating a gas by the heater;
• and
• blowing the heated gas to an irradiated surface of the linear laser light.

A method for manufacturing a semiconductor device comprising the steps of:

• forming a semiconductor film over a substrate;
• and
• blowing a heated gas while irradiating the semiconductor film with linear laser light;
• wherein the linear laser light is obtained by radiating laser light from a laser oscillator provided in a laser processing unit which further comprises a lens and a heater and processing the radiated laser light into a linear laser light using the lens,
• wherein the heated gas is obtained by heating a gas by the heater, and
• wherein the semiconductor device is formed by using the semiconductor film to which the heated gas is blown while irradiating with the linear laser light.