Method of manufacturing carbon nanotube field emission device
OwnerTae-Won Jeong, Jung-Na Heo +1inventors
InventorsTae-Won Jeong, Jung-Na Heo, Jeong-Hee Lee
Life of this patent
Estimating the term…
Abstract
A carbon nanotube emitter and a method of manufacturing a carbon nanotube field emission device using the carbon nanotube emitter. Powdered carbon nanotubes are adsorbed onto a first substrate. A metal is deposited on the carbon nanotubes. The resultant structure is pressure-bonded to a surface of a cathode. The first substrate is spaced apart from a second substrate to tense the carbon nanotubes, so that the carbon nanotubes are perpendicular to the first substrate.
Claims25
A method of manufacturing a carbon nanotube emitter, comprising:
- adsorbing carbon nanotubes onto a first substrate;
- forming a second metal layer on a second substrate;
- forming a first metal layer on one of the carbon nanotubes and the second metal layer;
- pressing the first substrate against the second substrate;
- spacing the first substrate apart from the second substrate to cause the carbon nanotubes to be perpendicular to the second substrate;
- and
- further spacing the first substrate apart from the second substrate to separate the carbon nanotubes from the first substrate.
A method of manufacturing a carbon nanotube emitter, comprising:
- adsorbing powdered carbon nanotubes onto a first substrate;
- forming a first metal layer in a predetermined pattern on the carbon nanotubes;
- forming a second metal layer on a second substrate;
- press-bonding the first metal layer to the second metal layer;
- spacing the first substrate apart from the second substrate to make the carbon nanotubes perpendicular to the second substrate;
- and
- further spacing the first substrate from the second substrate to separate the carbon nanotubes from the first substrate.
A method of manufacturing a carbon nanotube emitter, comprising:
- adsorbing powdered carbon nanotubes onto a first substrate;
- forming a second metal layer on a second substrate;
- forming a first metal layer in a predetermined pattern on the second metal layer;
- pressing the carbon nanotubes to bond the carbon nanotubes on the first substrate to the first metal layer;
- spacing the first substrate apart from the second substrate to make the carbon nanotubes perpendicular to the second substrate;
- and
- further spacing the first substrate from the second substrate to separate the carbon nanotubes from the first substrate.
A method of manufacturing a carbon nanotube field emission device, comprising:
- forming a cathode on a rear plate;
- adsorbing powdered carbon nanotubes onto a stamp substrate;
- depositing a first metal on the carbon nanotubes to form a first metal layer on the carbon nanotubes;
- pressure-bonding the first metal layer on the stamp substrate to the cathode on the rear plate;
- spacing the stamp substrate from the rear plate to make the carbon nanotubes perpendicular to the cathode on the rear plate;
- and
- further spacing the stamp substrate from the rear plate to separate the carbon nanotubes from the stamp substrate.
A method of manufacturing a carbon nanotube field emission device, the method comprising:
- forming a cathode on a rear plate;
- forming a metallic bonding layer on the cathode;
- adsorbing powdered carbon nanotubes onto a stamp substrate;
- pressure-bonding the carbon nanotubes on the stamp substrate to the metallic bonding layer on the cathode;
- spacing the stamp substrate from the rear plate to make the carbon nanotubes perpendicular to the cathode;
- and
- further spacing the stamp substrate from the rear plate to separate the carbon nanotubes from the stamp substrate.
Dependencies are inferred from the claim text.