Sputter ion pump and manufacturing method therefor and image display device with sputter ion pump
OwnerKazuyuki Seino, Yoshiyuki Shimadainventors
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Abstract
A sputter ion pump comprises a metal pump container. In the pump container are arranged a cathode and an anode opposed to each other in the pump container and a permanent magnet situated between the cathode and the inner surface of the pump container. After locating the anode, cathode, and magnetic material in the pump container, the magnetic material is magnetized from outside the pump container, thereby forming the permanent magnet.
Claims17
A sputter ion pump comprising:
- a pump container;
- a cathode and an anode opposed to each other in the pump container;
- and
- a permanent magnet located in the pump container and situated between the cathode and the inner surface of the pump container.
A method of manufacturing a sputter ion pump which comprises a pump container, a cathode and an anode opposed to each other in the pump container, and a permanent magnet located in the pump container and situated between the cathode and the inner surface of the pump container, the manufacturing method of a sputter ion pump comprising:
- locating the anode, cathode, and magnetic material in the pump container and then magnetizing the magnetic material from outside the pump container, thereby forming the permanent magnet.
An image display device comprising:
- a vacuum envelope which includes a front substrate having a phosphor screen and a rear substrate provided with a plurality of electron emission sources which excite the phosphor screen and is kept with a vacuum inside;
- and
- a sputter ion pump connected to the vacuum envelope and configured to exhaust the vacuum envelope,
- the sputter ion pump comprising a pump container connected to the vacuum envelope and having a vacuum inside, a cathode and an anode opposed to each other in the pump container, and a permanent magnet located in the pump container and situated between the cathode and the inner surface of the pump container.
Dependencies are inferred from the claim text.