Partition pattern match and integration method for alignment

A template search method for alignment comprising the steps of:

• a) Input an object;
• b) Input a template containing a template reference position;
• c) Perform alignment image acquisition from the object having alignment image output;
• d) Perform object pattern based template search using the alignment image and the template having template search result output;
• e) Perform comparison using the template search result and the template reference position having alignment data output.

A partition integration error self checking method that enhances the reliability of the partition template search result comprising the steps of:

• a) Input a preliminary template search result position;
• b) Input a plurality of the matching scores;
• c) Perform a zone conversion step using the preliminary template search result position having a zone index output;
• d) Perform expected matching score extraction using the zone index having an expected matching score profile output;
• e) Perform matching score profile comparison using the plurality of the matching scores and the expected matching score profile having the template search result output.

An object pattern based alignment method comprising the steps of:

• a) Input a learning image;
• b) Perform automatic object pattern based template generation using the learning image having template generation result output wherein the automatic object pattern based template generation generates partition templates.
• c) Input an alignment image;
• d) Perform object pattern based template search using the alignment image and the object pattern based template having template search result output.