LPP type extreme ultra violet light source apparatus and driver laser for the same
AssigneesKomatsu Ltd., Gigaphoton Inc.
InventorsAkira Endo, Tatsuya Ariga, Takashi Suganuma, Taisuke Miura
Life of this patent
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Abstract
A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
Claims5
A driver laser for extreme ultra violet light source apparatus, said driver laser comprising:
- a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value;
- and
- at least one amplifier that inputs the laser beam output from said short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
A driver laser for extreme ultra violet light source apparatus, said driver laser comprising:
- a short-pulse multi-line oscillated laser oscillator having a solid-state laser that outputs a short-pulsed laser beam and an optical parametric oscillation device that causes optical parametric oscillation based on the short-pulsed laser beam output from said solid-state laser such that the short-pulsed laser beam has a wider bandwidth;
- and
- at least one amplifier that inputs the laser beam output from said short-pulse multi-line oscillated laser oscillator and amplifies the input laser beam to output the amplified laser beam.
An LPP (laser produced plasma) type extreme ultra violet light source apparatus comprising:
- a driver laser for said extreme ultra violet light source apparatus, said driver laser including a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value, and at least one amplifier that inputs the laser beam output from said short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam;
- a target supplier that supplies a target material;
- and
- an optical system that guides the laser beam output from said driver laser such that the target material supplied from said target supplier is irradiated with the laser beam.
An LPP (laser produced plasma) type extreme ultraviolet light source apparatus comprising:
- a driver laser for said extreme ultra violet light source apparatus, said driver laser including a short-pulse multi-line oscillated laser oscillator having a solid-state laser that outputs a short-pulsed laser beam and an optical parametric oscillation device that causes optical parametric oscillation based on the short-pulsed laser beam output from said solid-state laser such that the short-pulsed laser beam has a wider bandwidth, and at least one amplifier that inputs the laser beam output from said short-pulse multi-line oscillated laser oscillator and amplifies the input laser beam to output the amplified laser beam;
- a target supplier that supplies a target material;
- and
- an optical system that guides the laser beam output from said driver laser such that the target material supplied from said target supplier is irradiated with the laser beam.
Dependencies are inferred from the claim text.