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US 2006/0077593 A1Published application
Slider, manufacturing method thereof, and head suspension assembly with the same
AssigneeSAE Magnetics (H.K.) Ltd.
InventorKunihiro Ueda
Life of this patent
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Abstract
A slider of the invention includes a substrate, a head element formed on the substrate and a protecting film formed on at least one portion of one surface of the substrate facing a magnetic recording medium. The protecting film comprises a base film, first DLC (diamond like carbon) film adjacent the substrate and a second DLC film. The carbon film density of said first DLC film is less than 3.1 (g/cm3) and the carbon film density of said second DLC film is more than 3.1 (g/cm3).
Claims10
A slider comprising:
- a substrate;
- head elements formed on the substrate;
- and
- a protecting film formed on at least one portion of one surface of the substrate facing a magnetic recording medium, wherein:
- said protecting film comprises a first DLC (diamond like carbon) film adjacent the substrate and a second DLC film;
- the carbon film density of said first DLC film is less than 3.1 (g/cm3);
- and
- the carbon film density of said second DLC film is more than 3.1 (g/cm3).
5 more elements
A manufacturing method of a slider comprising:
- a step of forming a head element on a substrate;
- and
- a step of forming a protecting film on at least one portion of one surface of the substrate facing a magnetic recording medium, wherein
- the step of forming the protecting film further comprises:
- a step of forming a base film which is mainly made from silicon element on said substrate;
- a step of forming a first DLC film on said base film such that the slider is grounded or floated;
- and
- a step of forming a second DLC film on said first DLC film using catholic arc method and by applying a bias voltage on said first DLC film, said bias voltage ranging from −25V to −150V.
5 more elements
A head suspension assembly, comprising:
- a slider;
- and
- a suspension, said slider is carried by said suspension at it's distal end and supported by said suspension, wherein:
- said slider comprises:
- a substrate;
- a head element formed on the substrate;
- and
- a protecting film formed on at least one portion of one surface of the substrate facing a magnetic recording medium;
- said protecting film comprises:
- a base film;
- a first DLC (diamond like carbon) film adjacent the substrate;
- and
- a second DLC film;
- wherein
- the carbon film density of said first DLC film is less than 3.1 (g/cm3);
- and the carbon film density of said second DLC film is more than 3.1 (g/cm3).
13 more elements
Dependencies are inferred from the claim text.