Mirror and mirror layer for optical modulator and method
AssigneeIdc, LLC
InventorsClarence Chui, Jeffrey Sampsell
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Abstract
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.
Claims51
A microelectromechanical systems mirror comprising a mirror body, wherein
- a surface of the mirror body comprises a reflective surface, and
- the mirror body comprises at least one cavity.
A microelectromechanical systems mirror comprising a mirror body, wherein
- a surface of the mirror body comprises a reflective surface,
- the mirror body comprises a body material and a sacrificial material, and
- the sacrificial material is preferentially etchable over the body material.
A method for fabricating a microelectromechanical systems mirror comprising a mirror body, wherein a surface of the mirror body comprises a reflective surface, the method comprising:
- depositing a mirror body comprising a reflective surface, wherein
- the mirror body comprises a body material and a sacrificial material, and
- the sacrificial material is preferentially etchable over the body material.
A method for fabricating a microelectromechanical systems mirror comprising a mirror body, wherein a surface of the mirror body comprises a reflective surface disposed on a surface of the mirror body, and wherein the mirror body comprises at least one cavity, the method comprising:
- depositing a mirror body comprising the reflective surface, and
- etching a cavity in the mirror body.
A microelectromechanical systems mirror comprising a mirror body and a reflective surface disposed on a face of the body, wherein the mirror body comprises a means for forming a cavity therein.
A microelectromechanical systems mirror comprising a mirror body, wherein a surface of the mirror body comprises a reflective surface, the microelectromechanical systems mirror manufactured by a method comprising:
- forming the mirror body comprising the reflective surface, wherein
- the mirror body comprises a body material and a sacrificial material, and
- the sacrificial material is preferentially etchable over the body material;
- and
- etching at least some of the sacrificial material from the mirror body.
An interferometric modulator comprising a first mirror and a second mirror, wherein the second mirror comprises a mirror body, wherein a surface of the mirror body compises a reflective surface disposed on a face of the body, wherein the body comprises at least one cavity.
A method for fabricating a microelectromechanical systems mirror comprising a mirror body, wherein a surface of the mirror body comprises a reflective surface, the method comprising:
- forming a mirror body comprising a reflective surface, wherein
- the mirror body comprises a body material and a sacrificial material, and
- the sacrificial material is preferentially etchable over the body material;
- and
- treating at least a portion of the sacrificial material to provide a treated material, wherein the sacrificial material is selectively etchable over the treated material and the body material.
Dependencies are inferred from the claim text.