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US 2006/0077374 A1Published application
Step and repeat imprint lithography systems
AssigneeMolecular Imprints, Inc.
InventorsSidlgata Sreenivasan, Michael Watts, Byung Choi, Mario Meissl, Norman Schumaker, Ronald Voisin
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Abstract
Described are systems for patterning a substrate by imprint lithography. Imprint lithography systems include an imprint head configured to hold a template in a spaced relation to a substrate. The imprint lithography system is configured to dispense an activating light curable liquid onto a substrate or template. The system includes a light source that applies activating light to cure the activating light curable liquid.
Claims1
A system for forming a pattern on a substrate, the system comprising:
- a body;
- an imprint head coupled to the body, positioned opposite said substrate, with said imprint head having a template positioned thereupon;
- and
- a device coupled to the body, said device aligning said template and said substrate.
1 more element
Dependencies are inferred from the claim text.