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US 2006/0077362 A1Published application
Exposure apparatus and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorTomoharu Hase
Life of this patent
Estimating the term…
Abstract
An exposure apparatus includes an illumination optical system for illuminating an original with ultraviolet light, a projection optical system for projecting a pattern of the original onto a substrate to be exposed, and a gas purging device for replacing an inside space, where optical components of at least one of the illumination optical system and the projection optical system are placed, with a gas containing substantially no water content or an inert gas.
Claims15
1-13. (canceled)
An exposure apparatus, comprising:
- an optical system having a first optical element, for directing light from a light source to a member to be exposed,
- wherein said first optical element serves to separate first and second spaces inside said optical system, and wherein said first optical element has a first notch formed at an end portion outside an effective light flux of light from the light source.
An exposure apparatus, comprising:
- a first separating portion for separating a first space and a second space from each other, said first separating portion having a first aperture and a second aperture;
- and
- a second separating portion for separating the second space and a third space from each other, said second separating portion having a third aperture and a fourth aperture,
- wherein said first aperture, said third aperture, said second aperture and said fourth aperture are disposed along the named order, with respect to a rotational direction about an optical axis of said exposure apparatus.
1 more element
An exposure apparatus, comprising:
- an optical system having a first transmission-type optical element, for directing light from a light source to a member to be exposed,
- wherein said first transmission-type optical element serves to separate first and second spaces inside said optical system, and wherein said first transmission-type optical element has a first notch.
Dependencies are inferred from the claim text.