# US 2006/0077145 A1 · Device having patterned spacers for backplates and method of making the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2006/0077145 A1 - Document ID: US20060077145A1 - Status: Published application - Kind: A1 - Application number: 11/074,253 - Filed: 2005-03-07 - Published: 2006-04-13 - Earliest claimed: 2004-09-27 - Assignees: QUALCOMM MEMS Technologies, Inc. - Inventors: Philip Floyd; Brian Arbuckle - Web page: https://patentgrep.com/patent/US20060077145A1 ## CPC - B81C 1/00269: {Bonding of solid lids or wafers to the substrate} - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - B81B 2201/042: Micromirrors, not used as optical switches - B81C 2203/019: characterised by the material or arrangement of seals between parts - B81C 2203/032: Gluing - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The packaging system disclosed herein comprises a patterned spacer that, in some embodiments, is fabricated using thin-film methods. In some embodiments, the spacer together with a substrate and backplate package an electronic device. ## Claims ### Claim 1 A display device, comprising: a substrate on which an array of interferometric optical modulators is formed, a backplate, and a patterned spacer disposed between the substrate and the backplate to form a package, wherein the spacer circumscribes the array and prevents the external environment from entering the package. ### Claim 2 (depends on 1) The display device of claim 1, wherein the patterned spacer is formed on the backplate. ### Claim 3 (depends on 1) The display device of claim 1, wherein the patterned spacer comprises a photoresist. ### Claim 4 (depends on 3) The display device of claim 3, wherein the photoresist is an epoxy-based photoresist. ### Claim 5 (depends on 1) The display device of claim 1, wherein the substrate comprises a transparent portion, and an image formed on the array of interferometric optical modulators is viewable through the substrate. ### Claim 6 (depends on 5) The display device of claim 5, wherein the substrate comprises glass. ### Claim 7 (depends on 1) The display device of claim 1, wherein the backplate is a recessed backplate. ### Claim 8 (depends on 1) The display device of claim 1, wherein the backplate comprises glass. ### Claim 9 (depends on 1) The display device of claim 1, wherein the display device further comprises a desiccant inside the package. ### Claim 10 (depends on 1) The display device of claim 1, wherein the desiccant is calcium oxide. ### Claim 11 (depends on 1) The display device of claim 1, wherein the display device further comprises an adhesive disposed between the spacer and the substrate. ### Claim 12 A method for fabricating a display device comprising: obtaining a substrate on which an array of interferometric optical modulators is formed; obtaining a backplate; forming a spacer by patterning, wherein said spacer is configured to circumscribe the array and prevent the external environment from contacting the array; and assembling the substrate, backplate, and spacer to provide the display device. ### Claim 13 (depends on 12) The method of claim 12, wherein the patterned spacer is formed on the backplate. ### Claim 14 (depends on 12) The method of claim 12, wherein the patterned spacer comprises a photoresist. ### Claim 15 (depends on 12) The method of claim 12, wherein the patterned spacer is formed using a mask. ### Claim 16 (depends on 12) The method of claim 12, wherein the substrate comprises a transparent portion, and an image formed on the array of interferometric optical modulators is viewable through the substrate. ### Claim 17 (depends on 12) The method of claim 12, wherein the substrate comprises glass. ### Claim 18 (depends on 12) The method of claim 12, wherein the backplate is a recessed backplate. ### Claim 19 (depends on 12) The method of claim 12, wherein the backplate comprises glass. ### Claim 20 (depends on 12) The method of claim 12, wherein the display device further comprises an adhesive disposed between the spacer and the substrate. ### Claim 21 A display device fabricated by a method comprising: obtaining a substrate on which a microelectromechanical device is formed; obtaining a backplate; forming a spacer by patterning, wherein said spacer is configured to circumscribe the array and prevent the external environment from contacting the array; and assembling the substrate, backplate, and spacer to provide the display device. ### Claim 22 (depends on 21) The display device of claim 21, wherein the patterned spacer is formed on the backplate. ### Claim 23 (depends on 21) The display device of claim 21, wherein the patterned spacer comprises a photoresist. ### Claim 24 (depends on 21) The display device of claim 21, wherein the patterned spacer is formed using a mask. ### Claim 25 (depends on 21) The display device of claim 21, wherein the substrate comprises a transparent portion, and an image formed on the array of interferometric optical modulators is viewable through the substrate. ### Claim 26 (depends on 21) The display device of claim 21, wherein the substrate comprises glass. ### Claim 27 (depends on 21) The display device of claim 21, wherein the backplate is a recessed backplate. ### Claim 28 (depends on 21) The display device of claim 21, wherein the backplate comprises glass. ### Claim 29 (depends on 21) The display device of claim 21, wherein the display device further comprises an adhesive disposed between the spacer and the substrate.