Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor
AssigneeInternational Business Machines Corporation
InventorsSri Sri-Jayantha, Hien Dang, Arun Sharma, Evangelos Eleftheriou, Mark Lantz, Charalampos Pozidis
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Abstract
A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
Claims18
A servo control system micro-electromechanical systems (MEMS)-based motion control system, comprising:
- a motion generator having an inherent stiffness component;
- and
- a feed-forward element for canceling the inherent stiffness component.
(canceled)
(canceled)
12-13. (canceled)
A servo control system for micro-electromechanical systems (MEMS)-based motion control system, comprising:
- a scanner having inherent stiffness;
- and
- a feedforward mechanism operatively coupled to said scanner for feedforwarding a component for counterbalancing the stiffness of said scanner.
15-24. (canceled)
25 The system of claim 1, further comprising:
- a feedback element for canceling the inherent stiffness component.
The system of claim 25, wherein the inherent stiffness component is counterbalanced such that a measured position is positively fed back.
27-36. (canceled)
Dependencies are inferred from the claim text.