Method for making a pressure sensor
AssigneeRosemount Aerospace Inc.
InventorsOdd Eriksen, Shuwen Guo
Life of this patent
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Abstract
A pressure sensor including a movable component that is configured to move when the pressure sensor is exposed to differential pressure thereacross, and a pressure sensing component located on the movable component. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the movable component. The pressure sensor is configured such that leads can be coupled to the pressure sensing component and the pressure sensing component can output a signal via the leads, the signal being related to a pressure to which the pressure sensor is exposed.
Claims34
1-23. (canceled)
A method for making a pressure sensor comprising the steps of:
- providing a substrate;
- forming or locating a pressure sensing component on said substrate;
- and
- after said forming or locating step, etching a cavity in said substrate below said pressure sensing component to define a diaphragm above said cavity with said pressure sensing component located on said diaphragm, wherein said pressure sensing component includes an electrically conductive electron gas and wherein the electron gas changes its electrical resistance thereacross upon movement of said diaphragm.
A method for making a sensor comprising the steps of:
- providing a substrate;
- forming or locating a sensing component on said substrate;
- and
- after said forming or locating step, etching a recess or cavity in said substrate below said sensing component to define a movable component above said recess or cavity with said sensing component located on said movable component, wherein said sensing component includes or forms an electrically conductive electron gas and wherein the electron gas changes its electrical resistance thereacross upon movement of said movable component.
Dependencies are inferred from the claim text.