Electronic device including an array and process for forming the same

A process for forming an electronic device an array, the process comprising:

• forming spaced-apart first insulating features over a substrate;
• forming a second insulating feature over the substrate and lying between the spaced-apart first insulating features, wherein a top surface of the second insulating feature lies at a lower elevation compared to a top surface of the spaced-apart first insulating features;
• forming a charge storage stack overlying the second insulating feature and lying between the spaced-apart first insulating features;
• and
• forming a control gate electrode overlying the charge storage stack and the second insulating feature and lying between the spaced-apart first insulating features.

An electronic device comprising:

• a substrate;
• a doped region within the substrate;
• a charge storage stack overlying the substrate;
• a first gate electrode layer overlying the charge storage stack;
• an insulating layer overlying the doped region and adjacent to the first gate electrode layer;
• and
• a second gate electrode layer overlying the insulating layer and contacting the first gate conductor.

A process for forming an electronic device comprising:

• implanting a doped region into the substrate;
• forming a charge storage stack over a substrate;
• forming a first gate electrode layer over the charge storage stack;
• forming an insulating layer over the charge storage stack and adjacent to the first gate electrode layer;
• and
• forming a second gate electrode layer over the insulating layer and contacting the first gate conductor.