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US 2006/0076565 A1Published application
Semiconductor light emitting element and fabrication method thereof
AssigneeSanken Electric Co., Ltd.
InventorsHitoshi Murofushi, Shiro Takeda
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Abstract
In a semiconductor light emitting element, multiple bosses having a cylindrical shape and dispersed like islands, and recesses are formed on the upper surface of a window layer. A contact electrode is formed on the upper surface of the bosses. A transparent dielectric film is formed in the recesses. A transparent conductor film is formed on the transparent dielectric film and the contact electrode.
Claims17
A semiconductor light emitting element, comprising:
- a semiconductor layer whose one surface comprises an optical window, on which a plurality of bosses and recesses are formed;
- a dielectric film having light transmissivity and formed in said recesses;
- and
- a conductor film having light transmissivity and formed on said one surface of said semiconductor layer,
- wherein said conductor film and said semiconductor layer are electrically connected to each other.
2 more elements
A fabrication method of a semiconductor light emitting element, comprising
- a step of forming a plurality of bosses and recesses on one surface of a semiconductor layer that comprises an optical window, forming a dielectric film having light transmissivity in said recesses, and forming a conductor film having light transmissivity on said one surface of said semiconductor layer,
- wherein in said step, said conductor film, said dielectric film, and said semiconductor layer are formed so that said conductor film and said semiconductor layer will be electrically connected to each other via said bosses.
Dependencies are inferred from the claim text.