Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner

An apparatus for optically coupling a laser source to a dual-column charged particle beam tool having an optical port, the apparatus comprising:

• a configurable laser light converter optically coupled with the laser source, the configurable laser light converter comprising:
• a first configuration wherein light provided by the laser source is converted to a first light beam comprising a first width;
• and
• a second configuration wherein light provided by the laser source is converted to a second light beam comprising a second width narrower than the first width;
• a first beam splitter optically coupled with the optical port and the configurable laser light converter;
• and
• an image sensor optically coupled with the first beam splitter.

An apparatus for optically coupling a laser source to a dual-column charged particle beam tool, the apparatus comprising:

• a beam splitter optically coupled with the laser source;
• a quarter-waveplate optically coupled with the laser source;
• a photo-detector optically coupled with the beam splitter;
• a frame grabber electrically coupled with the photo-detector;
• at least one scan mirror optically coupled with the beam splitter;
• a scanning lens optically coupled with the at least one scan mirror and an objective lens;
• at least one beam scanner configured to move the at least one scan mirror to alter an optical path of light from the laser source within the optical port;
• and
• a scanning controller electrically coupled with the at least one beam scanner, the scanning controller configured to control the movement of the at least one scan mirror via the at least one beam scanner.

An apparatus for optically coupling a laser source and a whitelight source to a dual-column charged particle beam tool having an optical port, the apparatus comprising:

• first means for directing light from the whitelight source through the optical port;
• second means for directing light from the laser source through the optical port;
• the light from the second light directing means being substantially parallel with the light from the first light directing means;
• and
• means for capturing imaging light from the optical port, the imaging light being directed toward the capturing means by the first and second light directing means.

An apparatus for optically coupling a laser source to a dual-column charged particle beam tool having an optical port, the apparatus comprising:

• means for converting light from the laser source into a light beam of a selectable width;
• means for directing the light beam from the converting means through the optical port;
• and
• means for capturing imaging light from the optical port, the imaging light being directed toward the capturing means by the light directing means.

An apparatus for optically coupling a laser source to a dual-column charged particle beam tool having an optical port, the apparatus comprising:

• means for scanning a light beam from the laser source through an area of the optical port;
• means for capturing imaging light from the optical port;
• and
• means for directing the imaging light from the optical port to the capturing means.