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US 2006/0076486 A1Published application
Material surface analyzing method
AssigneeSamsung Electronics Co., Ltd.
InventorIgor Asanov
Life of this patent
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Abstract
A material surface analyzing method includes measuring composition of elements at each data point after setting M-number data points on a sample surface containing N-number elements, calculating a concentration distance value between the data points using the measured composition of the elements, and determining a phase distribution of the sample surface using the calculated concentration distance value.
Claims20
A material surface analyzing method comprising:
- measuring composition of elements at each data point after setting M-number data points on a sample surface containing N-number elements;
- calculating a concentration distance value between the data points using the measured composition of the elements;
- and
- determining a phase distribution of the sample surface using the calculated concentration distance value.
1 more element
Dependencies are inferred from the claim text.