Back to results
US 2006/0076314 A1Published application
Method for forming a pattern
AssigneeKabushiki Kaisha Toshiba
InventorNaoaki Sakurai
Life of this patent
Estimating the term…
Abstract
One aspect of the present invention is directed to a method of forming a pattern. A first layer which comprises a polymerization initiator is selectively formed on a second layer of a substrate. A polymer layer is selectively formed on the first layer by subjecting an organic monomer to living radical polymerization using the polymerization initiator. The second layer is selectively etched using the polymer layer as a mask.
Claims18
A method of forming a pattern, comprising:
- selectively forming a first layer which comprises a polymerization initiator on a second layer of a substrate;
- selectively forming a polymer layer on the first layer by subjecting an organic monomer to living radical polymerization using the polymerization initiator;
- and
- selectively etching the second layer using the polymer layer as a mask.
1 more element
A method of forming a pattern, comprising:
- selectively forming a first layer which comprises a polymerization initiator on a second layer of a substrate;
- selectively forming a first polymer layer on the first layer by subjecting a first organic monomer to living radical polymerization;
- selectively forming a second polymer layer on the first polymer by subjecting a second organic monomer to living radical polymerization;
- and
- selectively etching the second layer using the second polymer layer as a mask.
2 more elements
A method of manufacturing an electronic device, comprising:
- selectively forming an underlying active layer which comprises a polymerization initiator on a wiring material layer of a substrate;
- selectively forming a polymer layer on the underlying active layer by subjecting an organic monomer to living radical polymerization using the polymerization initiator;
- and
- selectively etching the wiring material layer using the polymer layer as a mask to form a wiring for the electronic device.
1 more element
Dependencies are inferred from the claim text.