Heated substrate support and method of fabricating same
AssigneeApplied Materials, Inc.
InventorsRolf Guenther, Curtis Hammill
Life of this patent
Estimating the term…
Abstract
A method and apparatus for forming a substrate support is provided herein. In one embodiment, the substrate support includes a body having a support surface and at least one groove. A heater element surrounded with a malleable heat sink is disposed in the groove. The heat sink may be comprised of one or more parts. A cap is disposed in the groove above the heat sink and has an upper surface disposed substantially flush with the support surface.
Claims26
A substrate support comprising:
- an aluminum body having a support surface;
- at least one groove formed in the body;
- a first malleable heat sink disposed within the groove;
- a heater element disposed within the groove and in contact with the first heat sink;
- and
- a second malleable heat sink disposed in the groove and in contact with the first heat sink and the heater element.
A substrate support, comprising:
- an aluminum body having a support surface and at least one groove;
- a heater element disposed in the groove;
- a first malleable heat sink comprised of an aluminum alloy in the range of from about aluminum 1XXX, wherein X is an integer, to about aluminum 3000-100 series and disposed the groove and separating the heater element from the body, the first heat sink having a legs extending from a center section along walls for the groove;
- a second malleable heat sink comprised of an aluminum alloy in the range of from about aluminum 1XXX, wherein X is an integer, to about aluminum 3000-100 series press fit between the legs of the first heat sink, the first and second heat sinks separating the heater element from the body;
- and
- a cap disposed in the groove, the cap having an outer surface disposed substantially flush with the support surface body.
A method of forming a substrate support, comprising:
- providing an aluminum body having at least one groove formed in a surface thereof;
- disposing a first malleable heat sink in the groove;
- inserting a heater element into the groove;
- disposing a second malleable heat sink in the groove over the heater element;
- applying sufficient pressure to the second heat sink to cause at least one of the heat sinks to come in intimate contact with the body;
- and
- inserting a cap into and sealing the groove, wherein an outer surface of the cap is disposed substantially flush with the body.
A method of forming a substrate support, comprising:
- providing aluminum body having at least one groove formed in a support surface thereof;
- inserting a first malleable heat sink comprised of an aluminum material softer than the body in the groove;
- inserting a second malleable heat sink comprised of an aluminum material softer than the body in the groove, the first and second heat sinks sandwiching a heater element, the first and second heat sink;
- and
- capping the groove with a cap having an upper surface disposed substantially flush with the upper support surface.
Dependencies are inferred from the claim text.