Heated substrate support and method of fabricating same
OwnerRolf Guenther, Curtis Hammillinventors
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Abstract
A method and apparatus for forming a substrate support is provided herein. In one embodiment, the substrate support includes a body having a support surface and at least one groove. A heater element clad with a malleable heat sink is disposed in the groove. Substantially no air is trapped between the clad heater element and the groove. An insert is disposed in the groove above the heater. The insert substantially completely covers and contacts the clad heater element and the sides of the groove. A cap is disposed in the groove above the insert. The cap covers and contacts the insert and has an upper surface disposed substantially flush with the support surface.
Claims46
A substrate support comprising:
- a body having a support surface;
- at least one groove formed in the body;
- a heater element disposed within the groove;
- and
- a heat sink circumscribing the heater element and in contact with the heater element and the body.
A substrate support, comprising:
- an aluminum body having a support surface and at least one groove;
- a heater element clad with a malleable heat sink and press fit into the groove;
- an insert disposed in the groove, wherein the insert contacts the heater element and the sides of the groove;
- and
- a cap disposed in the groove, the cap having an outer surface disposed substantially flush with the body.
A method of forming a substrate support, comprising:
- providing a body having at least one groove formed in a surface thereof;
- inserting a heater element into the groove, wherein the heater element is encased in an outer cladding having substantially no air pockets trapped between the cladding and the heater element, the cladding adapted to be a heat sink;
- disposing an insert in the groove over the clad heater element;
- and
- inserting a cap into the groove, wherein an outer surface of the cap is disposed substantially flush with the body.
A method of forming a substrate support, comprising:
- providing a body having at least one groove formed in a support surface thereof;
- inserting a heater element into the groove, the heater element clad with a material softer than the body and adapted to be a heat sink;
- covering the clad heater element with an insert disposed in the groove;
- and
- capping the groove with a cap having an upper surface disposed substantially flush with the upper support surface.
Dependencies are inferred from the claim text.