US 2006/0075822 A1 · Fluororesin thin film diaphgragm pressure sensor and method of fabricating the same

Abstract

The present invention provides a highly corrosion-resistant diaphragm pressure sensor capable of obviating the effects of temperature drift that arises when a pressure-travel coefficient changes with temperature of a fluid whose pressure is sensed, and a method of manufacturing the same. A fluororesin thin film diaphragm pressure sensor comprises a pressure sensing element (10, 20) having a pressure receiving part with a deposition electrode formed on each of the opposing faces of sapphire or alumina ceramic diaphragms which are arranged in opposing relation, and a welding portion (10A, 20A) on a part of each of the surfaces of the diaphragms; and a fluororesin base (41, 61) for securing the pressure sensing element at the welding portion of the pressure sensing element. The pressure sensing element is coated with a fluororesin thin film having a cross-linked structure, and the pressure sensing element and the fluororesin base are welded together via the fluororesin thin film having a cross-linked structure.

Claims12

Dependent claims

A fluororesin thin film diaphragm pressure sensor, comprising:

a pressure-sensing element having a pressure-receiving part with a deposition electrode formed on each opposing surface of sapphire or alumina ceramic diaphragms which are provided in opposing relation to each other, and a welding portion on a portion of the surface of each of the diaphragms;
a fluororesin base for securing the pressure-sensing element at the welding portion of the pressure-sensing element;
and
said pressure-sensing element being coated with a fluororesin thin film having a cross linked structure, said pressure-sensing element and said fluororesin base being welding together via said fluororesin thin film having a cross linked structure;
whereby a measured pressure of a medium is transferred to said pressure-receiving part and variations in the distance between the deposition electrodes formed on the opposing faces of the opposing diaphragms respectively cause a change in capacitance.

2 more elements

A method of fabricating a fluororesin thin film diaphragm pressure sensor for sensing a pressure of a fluid, comprising the steps of:

forming a pressure-sensing element having a pressure-receiving part with a deposition electrode formed on each of the opposing surfaces of sapphire or alumina ceramic diaphragms which are provided in opposing relation to each other, and a welding portion constituting a portion of the surface of each of the diaphragms;
forming a fluororesin thin film on said pressure-sensing element;
holding the fluororesin thin film formed on said pressure-sensing element at high temperatures and applying electron beam to the fluororesin thin film to thereby change the molecular structures of fluororesin of the fluororesin thin film to a crosslinked structure;
preparing a fluororesin base for securing said pressure-sensing element;
and
securing said pressure-sensing element to said fluororesin base at the welding portion of said pressure-sensing element via said fluororesin thin film having a crosslinked structure formed on said pressure-sensing element.

3 more elements

Dependencies are inferred from the claim text.

Fluororesin thin film diaphgragm pressure sensor and method of fabricating the same

Life of this patent

Fluororesin thin film diaphgragm pressure sensor and method of fabricating the same

Life of this patent

Abstract

Claims12