Method for making electronic devices having a dielectric layer surface treatment
Assignee3M Innovative Properties Company
InventorsTimothy Dunbar, Tommie Kelley
Life of this patent
Estimating the term…
Abstract
A method of making an electronic device by (a) depositing a substantially nonfluorinated polymeric layer onto a dielectric layer using a plasma-based deposition technique selected from the group consisting of (i) plasma polymerizing a precursor comprising monomers, and (ii) sputtering from a target comprising one or more polymers of interpolymerized units of monomers, the monomers being selected from the group consisting of aromatic monomers, substantially hydrocarbon monomers, and combinations thereof; and (b) depositing an organic semiconductor layer adjacent to said polymeric layer.
Claims28
A method of making an organic electronic device comprising:
- (a) depositing a substantially nonfluorinated polymeric layer onto a dielectric layer using a plasma-based deposition technique selected from the group consisting of
- (i) plasma polymerizing a precursor comprising monomers, and
- (ii) sputtering from a target comprising one or more polymers of interpolymerized units of monomers, said monomers being selected from the group consisting of aromatic monomers, substantially hydrocarbon monomers, and combinations thereof;
- and
- (b) depositing an organic semiconductor layer adjacent to said polymeric layer.
A method of making an organic thin film transistor comprising:
- (a) providing a substrate,
- (b) vapor depositing a gate electrode material on said substrate,
- (c) vapor depositing a gate dielectric on said gate electrode material,
- (d) plasma polymerizing a precursor comprising monomers selected from the group consisting of aromatic monomers, substantially hydrocarbon monomers, and combinations thereof onto said gate dielectric to form a substantially nonfluorinated polymeric layer thereon,
- (e) vapor depositing an organic semiconductor layer adjacent to said polymeric layer, and
- (f) vapor depositing a source electrode and a drain electrode contiguous to said organic semiconductor layer.
An organic electronic device comprising a substantially nonfluorinated polymeric layer on a dielectric layer and an organic semiconductor layer adjacent to said polymeric layer, said polymeric layer comprising an aromatic polymer or a substantially hydrocarbon polymer and being substantially insoluble.
Dependencies are inferred from the claim text.