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US 2006/0068518 A1Published application
Forming vertically aligned liquid crystal mixtures
OwnerAnna Georgeinventor
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Abstract
Vertically aligned liquid crystal molecules may be formed using spin-on-glass deposition. After deposition, the molecules may be exposed to an oblique ion beam or e-beam bombardment. Other techniques for alignment involve microstructure formation such as using a double sided scrubber or high oxygen plasma processing. As a result, more conventional integrated circuit fabrication techniques may be utilized to form the vertically aligned liquid crystal layer giving higher reliability and a wider process window.
Claims29
A method comprising:
- forming an alignment layer using a spin-on-glass technique;
- and
- applying a liquid crystal layer in contact with said alignment layer.
A liquid crystal over semiconductor integrated circuit comprising:
- a liquid crystal layer;
- and
- a pair of electrodes on either side of said liquid crystal layer, each of said electrodes including a spin-on glass alignment layer.
A method comprising:
- forming a set of electrodes in a substrate;
- forming a spin-on-glass layer over said electrodes;
- applying a liquid crystal layer in contact with said spin-on-glass layer;
- and
- forming a cover over said liquid crystal layer.
2 more elements
Dependencies are inferred from the claim text.