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US 2006/0068096 A1Published application
Method of synthesising carbon nano tubes
AssigneesElectrovac, Fabrikation elektrotechnischer Spezialartikel Gesellschaft m.b.H., IMS-Ionen Mikrofabrikations Systeme GmbH
InventorsXinhe Tang, Klaus Mauthner, Ernst Hammel, Hans Loschner, Elmar Platzgummer, Gerhard Stengl
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Abstract
Method of synthesising carbon nano tubes (CNTs) on a catalyst layer formed on a support member, by catalytic deposition of carbon from a gaseous phase, whereby an ion beam is used prior to, during and/or after formation of said carbon nano tubes for modifying the physical, chemical and/or conductive properties of said carbon nano tubes.
Claims30
A method of synthesizing carbon nano tubes (CNTs), the method comprising:
- catalytically depositing carbon from a gaseous phase to form or synthesize CNTs on a catalyst layer formed on a support member,
- using an ion beam with an energy from 10 keV to 100 keV and having a plurality of sub-beams, prior to, during and after formation of said carbon nano tubes to modify properties selected from the group consisting of physical, chemical and conductive properties of the carbon nano tubes, and
- controlling the plurality of sub-beams by a multi-beam ion optical system.
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Dependencies are inferred from the claim text.