Leak judgment method, and computer-readable recording medium with recorded leak-judgment-executable program

A deposited-film formation process comprising the steps of:

• evacuating the inside of an inside-evacuatable chamber through an evacuation piping by an evacuation means;
• feeding a material gas into the chamber while evacuating the inside of the chamber;
• and
• applying a high-frequency power to form a deposited film on a substrate disposed inside the chamber;
• and
• detecting a leak on the basis of a measured value of a temperature sensor mounted on a downstream side of a piping connection part of the evacuation piping, said temperature sensor detecting the heat of reaction that is generated when the material gas fed into the chamber reacts with oxygen contained in air having entered from the outside, so as to be able to stop the material gas feeding.

A leak judgment method comprising the steps of:

• feeding a reactive gas to the inside of a vacuum system having a chamber and an evacuation piping;
• measuring temperature of the vacuum system at a plurality of spots thereof;
• and
• judging the occurrence of a leak on the basis of a change with time of a plurality of measured values obtained by measuring the temperature.