Methods for visually inspecting interferometric modulators for defects
AssigneeIdc, LLC
InventorsWilliam Cummings, Brian Gally
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Abstract
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators via a single test pad or test lead, and then observing the array for discrepancies between the expected optical output and the actual optical output of the array. This method may particularly include, for example, driving a set of non-adjacent rows or columns to a state different from the intervening rows or columns, and then observing the optical output of the array.
Claims47
A method of testing an array of interferometric modulators, the method comprising:
- applying a first signal at least partly contemporaneously to a first plurality of non-adjacent columns of interferometric modulators to place the interferometric modulators in said first plurality of non-adjacent columns in an actuated state;
- and
- inspecting said array of interferometric modulators to identify defects in said array, wherein said inspecting is performed after application of said first signal.
A method of testing an array of interferometric modulators, the method comprising:
- applying a first waveform at least partly contemporaneously to each of a first plurality of non-adjacent rows of interferometric modulators;
- applying a second waveform at least partly contemporaneously to each of a second plurality of non-adjacent rows of interferometric modulators;
- applying a third waveform at least partly contemporaneously to each of a first plurality of non-adjacent columns of interferometric modulators;
- applying a fourth waveform at least partly contemporaneously to each of a second plurality of non-adjacent columns of interferometric modulators;
- and
- inspecting said array of interferometric modulators to identify defects in the array.
A method of inspecting an array of interferometric modulators, comprising:
- driving each modulator in the array of interferometric modulators to a known first state;
- driving a subset of columns of interferometric modulators within the array from said known first state to a second state, wherein said second state is the opposite of said first state;
- and
- inspecting said array of interferometric modulators to identify defects in the array.
A device, comprising,
- a substrate;
- a first plurality of non-adjacent row electrodes supported by the substrate;
- a second plurality of non-adjacent row electrodes supported by the substrate;
- a first buss bar in electrical connection with the first plurality of row electrodes;
- a second buss bar in electrical connection with the second plurality of row electrodes;
- a first plurality of non-adjacent column electrodes spaced apart from the substrate;
- a second plurality of non-adjacent column electrodes spaced apart from the substrate;
- a third buss bar in electrical communication with the first plurality of column electrodes;
- and
- a fourth buss bar in electrical communication with the first plurality of column electrodes.
A device, comprising:
- first means for conducting a first plurality of signals;
- means for supporting said first means for conducting a plurality of signals;
- second means for conducting a second plurality of signals;
- first means for selectively providing a waveform to each of a first portion of said first conducting means;
- second means for selectively providing a waveform to each of a second portion of said first conducting means;
- third means for selectively providing a waveform to each of a first portion of said second conducting means;
- and
- fourth means for selectively providing a waveform to each of a second portion of said second conducting means.
Dependencies are inferred from the claim text.