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US 2006/0067646 A1Published application
MEMS device fabricated on a pre-patterned substrate
AssigneeIdc, LLC
InventorClarence Chui
Life of this patent
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate reflected light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
Claims42
A method of making a microelectromechanical systems device, comprising:
- providing a substrate having a plurality of trenches;
- depositing at least one layer over the substrate, wherein the layer is discontinuous at the trenches;
- and
- creating a first cavity between a first electrode formed over the substrate and a second electrode, wherein the at least one layer comprises the first electrode.
1 more element
A display device, comprising:
- a substrate embossed having a plurality of grooves formed therein;
- a first electrode formed over a top surface of the substrate and a second electrode, wherein the first electrode and the second electrode are insulated from each other and separated by a first cavity;
- a semi-reflective layer separated from the second electrode by a second cavity;
- and
- a transparent material formed over the semi-reflective layer.
2 more elements
A method of forming a microelectromechanical systems device, comprising:
- providing a substrate having a top surface, wherein a plurality of grooves is formed in the top surface;
- depositing at least one layer over the substrate, wherein the at least one layer comprises a first conductive material and is discontinuous at the grooves forming rows of the layer between the grooves on the top surface;
- and
- depositing a second conductive material, wherein the second conductive material is oriented orthogonally to the first conductive material on the top surface.
1 more element
A display device, comprising
- a substrate having a plurality of grooves formed therein;
- a first reflecting means for reflecting light formed over a top surface of the substrate and a second reflecting means for reflecting light, wherein the first reflecting means and the second reflecting means are insulated from each other and separated by a first cavity;
- a semi-reflective layer separated from the second reflecting means by a second cavity;
- and
- a viewing means for transmitting light, the viewing means formed over the semi-reflective layer.
2 more elements
Dependencies are inferred from the claim text.