System and method of testing humidity in a sealed MEMS device

A method of testing humidity, comprising:

• measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor;
• comparing the weights of the first and second devices;
• and
• determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison.

A system for testing humidity, comprising:

• a first device enclosing a plurality of interferometric modulators;
• a second device enclosing a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor;
• and
• a scale configured to measure the weights of the first and second devices,
• wherein a relative humidity value or a degree of the relative humidity inside one of the two devices is determined based at least in part upon the measured weights.

A method of testing humidity, comprising:

• providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant, wherein the desiccant is configured to change its color based on an amount of water vapor absorbed therein;
• determining a degree of a color change of the desiccant;
• and
• determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined degree of the color change.

A method of manufacturing a microelectromechanical systems (MEMS) device, the method comprising:

• providing a substrate;
• forming a plurality of interferometric modulators on the substrate;
• providing a desiccant configured to change its color based on an amount of water vapor absorbed therein;
• providing a backplate;
• and
• joining the substrate and the backplate so as to form a device which encloses the plurality of interferometric modulators and the desiccant,
• wherein the backplate includes at least one transparent portion through which the color change of the desiccant can be viewed from the outside of the device.

A microelectromechanical systems (MEMS) device, comprising:

• a substrate;
• a plurality of interferometric modulators formed on the substrate;
• a desiccant configured to change its color based on an amount of water vapor absorbed therein;
• and
• a backplate;
• wherein the substrate and backplate are joined to each other so as to form a device which encloses the plurality of interferometric modulators and the desiccant,
• wherein the backplate includes at least one transparent portion through which the color change of the desiccant can be viewed from the outside of the device.

A method of testing humidity, comprising:

• providing a device which encloses a plurality of interferometric modulators;
• measuring a resistance of at least one interior part of the device;
• and
• determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the measured resistance.

A system for testing humidity, comprising:

• a device enclosing a plurality of interferometric modulators;
• and
• a resistive sensor configured to measure a resistance of at least one interior part of the device,
• wherein a relative humidity value or a degree of the relative humidity inside the device is determined based at least in part upon the measured resistance.

A method of testing humidity, comprising:

• i) providing a device which encloses a plurality of interferometric modulators;
• ii) operably contacting an outside area of the device with a cold finger device, set at a first temperature;
• iii) determining whether frost forms in an inside area of the interferometric modulator device to the contacted area;
• and
• iv) determining a relative humidity value or a degree of the relative humidity inside the interferometric modulator device based at least in part upon whether frost has formed in the inside area.

A system for testing humidity, comprising:

• a device enclosing a plurality of interferometric modulators;
• and
• a cold finger device configured to make an operable contact with an outside area of the device,
• wherein a relative humidity value or a degree of the relative humidity inside the interferometric modulator device is determined based at least in part upon whether frost has formed in the inside area.

A method of testing humidity, comprising:

• providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant;
• measuring a first weight of the device;
• providing water vapor into the inside of the device;
• measuring a second weight of the device after the water vapor has been provided into the device;
• comparing the first and second weights;
• and
• determining a degree of the relative humidity inside the device based at least in part upon the weight comparison.