Method of fabricating interferometric devices using lift-off processing techniques
AssigneeIdc, LLC
InventorsClarence Chui, Ming-Hau Tung
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Abstract
Embodiments of the present disclosure include a method of fabricating interferometric devices using lift-off processing techniques. Use of lift-off processing in the fabrication of various layers of interferometric modulators, such as an optical stack or a flex layer, advantageously avoids individualized chemistries associated with the plurality of materials associated with each layer thereof. Moreover, use of lift-off processing allows much greater selection in both materials and facilities available for fabrication of interferometric modulators.
Claims37
A method of fabricating an interferometric modulator, comprising:
- forming an optical stack on a transparent substrate using at least a first patterning fabrication process;
- forming a supporting structure over the substrate;
- and
- forming an upper mirror layer over the optical stack and supporting structure using at least a second pattering fabrication process;
- wherein a cavity is formed by at least one surface of the optical stack, the supporting structure and the upper mirror layer, where movement of a portion of the upper mirror layer into the cavity changes the optical properties perceived from a surface of the substrate in a controllable and predictable manner, and wherein at least one of the first and second fabrication processes comprises a lift-off process.
A method of making an interferometric modulator, comprising:
- forming a lift-off stencil over a substrate;
- depositing a first material layer over the lift-off stencil and over the substrate;
- depositing a second material layer over the first material layer;
- and
- removing the lift-off stencil to thereby form a patterned region comprising the second material layer over the first material layer.
A method of fabricating an array of interferometric modulators, comprising:
- forming a plurality of positively patterned optical stacks and a plurality of negatively patterned post regions on a substrate using a lift-off stencil;
- and
- forming a plurality of post structures in the negatively patterned post regions.
A method of making a display device, comprising:
- depositing a first mirror layer;
- depositing a sacrificial layer over the first mirror layer;
- forming a lift-off stencil over the sacrificial layer;
- depositing a second mirror layer over the lift-off stencil;
- removing the lift-off stencil, thereby forming a patterned region of the second mirror layer and exposing a portion of the sacrificial layer.
Dependencies are inferred from the claim text.