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US 2006/0067642 A1Published application
Method and device for providing electronic circuitry on a backplate
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorKaren Tyger
Life of this patent
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Abstract
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.
Claims28
A display, comprising:
- a transparent substrate;
- an array of interferometric modulators comprising reflective elements that are configured to reflect light through said transparent substrate;
- a backplane comprising a first surface proximal to the array of interferometric modulators and comprising electronic circuitry fabricated on said first surface of the backplane, wherein the electronic circuitry is configured to control the movement of the reflective elements;
- and
- a plurality of electrical connections providing electronic communication between the electronic circuitry on the backplane and the array of interferometric modulators.
2 more elements
A method of fabricating a display, comprising:
- providing a transparent substrate comprising an array of interferometric modulators on a first surface of the transparent substrate, wherein said modulators comprise reflective elements;
- providing a backplate having a first surface;
- forming electronic circuitry on the first surface of the backplate, wherein the electronic circuitry is configured to control the state said reflective elements;
- and
- positioning the transparent substrate and the backplate such that the first surface of the transparent substrate is located proximal the first surface of the backplate and the electronic circuitry is placed in electrical connection with the array of interferometric modulators.
2 more elements
A display, the process of manufacturing said display comprising:
- providing a transparent substrate having a first surface;
- forming an array of interferometric modulators on the first surface of the transparent substrate, wherein said modulators comprise reflective elements;
- providing a backplate having a first surface;
- forming electronic circuitry on the first surface of the backplate, wherein the electronic circuitry is configured to control the state said reflective elements;
- and
- positioning the transparent substrate and the backplate such that the first surface of the transparent substrate is located proximal the first surface of the backplate and the electronic circuitry is placed in electrical connection with the array of interferometric modulators.
3 more elements
A device comprising an interferometric modulator-based display, said display comprising:
- a transparent substrate, said transparent substrate comprising a first substrate surface;
- an array of interferometric modulators comprising reflective elements that are configured to reflect light through said transparent substrate;
- a backplane comprising a first surface proximal to the array of interferometric modulators, wherein said first surface of the backplane comprises electronic circuitry configured to control the movement of the reflective elements;
- and
- a plurality of electrical connections providing electronic communication between the electronic circuitry on the backplane and the array of interferometric modulators.
2 more elements
A display, comprising:
- a transparent substrate, said transparent substrate comprising a first substrate surface;
- an array of interferometric modulators comprising reflective elements that are configured to reflect light through said transparent substrate;
- a backplane comprising a first surface proximal to the array of interferometric modulators, wherein said first surface of the backplane comprises electronic circuitry configured to control the movement of the reflective elements;
- and
- means for providing electronic communication between the electronic circuitry on the backplane and the array of interferometric modulators.
2 more elements
Dependencies are inferred from the claim text.